Actuating device of handler for semiconductor manufacturing process

摘要

PURPOSE: A handler drive apparatus is provided to minimize minute particle generation due to abrasion, thereby minimizing damage of other adjacent components. CONSTITUTION: A guide rail(100) is arranged on the upper surface of a base table in which a whole side surface or a part of the side surface has an arc shape. The guide rail has the same arc shape as the side surface and is arranged along the edge of the side surface. A transfer table(200) is arranged in order to be transferred along the guide rail. A transfer module(300) transfers the transfer table along the side surface of the base table. The guide rail is comprised of a first guide rail and a second guide rail which are arranged in parallel to each other with a fixed interval. The transport module comprises a guide link, a driving part, and an idler.