发明名称 dust removal system of semiconductor chip
摘要 PURPOSE: A dust removing system of a chip pad is provided to improve work efficiency and productivity by spraying compressed air through a main spray nozzle and a selection spray nozzle. CONSTITUTION: A spraying unit(10) is located on the upper side of a conveyor belt and includes a main spray nozzle and a selection spray nozzle. An air supply unit is connected to the spraying unit through an air supply line to supply compressed air to the spraying unit. A solenoid valve(30) is connected to the air supply line and supplies or blocks air from the air supply unit to the spraying unit. A vacuum ejector is connected to the air supply line which is connected to the solenoid valve. A flow meter measures the air pressure of the compressed air supplied to the main spray nozzle of the spraying unit. An air supply control unit(60) selectively supplies or blocks the compressed air to the selection spray nozzle of the spraying unit.
申请公布号 KR101115988(B1) 申请公布日期 2012.02.13
申请号 KR20110115416 申请日期 2011.11.07
申请人 JEON, HYUNG MIN 发明人 JEON, HYUNG MIN
分类号 H01L21/60 主分类号 H01L21/60
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