NONCONTACT CONVEYING APPARATUS

摘要

PURPOSE: A non-contact conveying apparatus is provided to simplify the structure of the apparatus by forming air guide line and a vacuum guide line on two separated plates. CONSTITUTION: A non-contact conveying apparatus comprises a conveying plate and a compressed air supply unit. The conveying plate comprises upper and lower plates(110,130). The upper plate has multiple air holes(111) and vacuum holes(113). The lower plate is arranged under the upper plate. The conveying plate conveys substrates using high-pressure compressed air emitted from the air holes. The compressed air supply unit supplies the high-pressure compressed air to the conveying plate. Vacuum guide lines(136) connected to the vacuum holes are formed by multiple vacuum guide ducts having vacuum guide holes connected to the vacuum holes. Air guide lines connected to the air holes are formed between the vacuum guide ducts.