| 摘要 |
A device for application of coating comprises the vacuum chamber with vacuum-arc source of plasma and power supply of arc discharge, which connected to a source of plasma, pad holder with articles, which are processed, located inside of vacuum chamber, high-voltage block of ion purification with protection system and connecting line which is connected by its input to the output of high-voltage block of ion purification with protection system, and by output tothepad holderand vacuum chamber. Additional protection system is inserted in device, connected with one side to the output of connecting line and with another side to pad holderand vacuum chamber. |
