Luminescence device

摘要

PURPOSE: A light emitting device is provided to arrange a concavo-convex shape with predetermined roughness on the surface of a transparent electrode, thereby improving external quantum efficiency of the light emitting device. CONSTITUTION: An n-type semiconductor layer(120), an active layer, a p-type semiconductor layer(140), and a transparent electrode layer(150) are successively arranged on a substrate. A concavo-convex shape is formed on the surface of the transparent electrode by processing with ions. The concavo-convex shape with 50 to 50000Å roughness is formed on the n-type semiconductor layer. A high density ion injection layer is arranged between the p-type semiconductor layer and the transparent electrode layer.