MANUFACTURING METHOD OF SILICON MULTILAYER ANTIREFLECTIVE FILM WITH GRADED REFRACTIVE INDEX AND SOLAR CELLS HAVING THE SAME

摘要

PURPOSE: A manufacturing method of a silicon multilayer antireflective film with a graded refractive index and solar cells having the same are provided to change a refractive index gradually through a silicon multilayer by changing a tilt angle. CONSTITUTION: A plurality of silicon multi-layers(2-5) are laminated in a substrate. The silicon layer controls an angle of inclination on the substrate and changes refractive index gradually. The substrate is comprised of a glass substrate or a semiconductor substrate. . The silicon layer has refractive index which increase or decrease gradually.