| 摘要 |
PROBLEM TO BE SOLVED: To improve defective product detection precision in defective integrated circuit detection in comparison with defective product detection based on a single measurement item. SOLUTION: A distribution chart is created by a distribution chart creation unit 3 from measurements A and B on different measurement items or measurement conditions, and a regression line thereof is determined by a regression line calculation unit 4. Distances between points on the distribution chart and the regression line is calculated by a distance calculation unit 5, and a point indicating a value of a distance above a previously designated reference value is detected by a determination unit 6. In a result output unit 8, an integrated circuit corresponding to such a point indicative of out-value is outputted as a defective product. COPYRIGHT: (C)2008,JPO&INPIT
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