MAGNESIUM BIS(DIALKYLAMIDE) COMPOUND, AND PROCESS FOR PRODUCTION OF MAGNESIUM-CONTAINING THIN FILM USING THE MAGNESIUM COMPOUND

摘要

The present invention relates to: a magnesium bis(dialkylamide) compound represented by general formula (1) (wherein R1 represents an isopropyl group, or a branched alkyl group having 4-6 carbon atoms; and R2 represents a linear or branched alkyl group having 1-5 carbon atoms; wherein a case in which each of R1 and R2 represents an isopropyl group, a case in which each of R1 and R2 represents an isobutyl group and a case in which R1 represents an isopropyl group and R2 represents a methyl group are excluded); and a process for producing a magnesium-containing thin film using the magnesium compound.