摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interference filter capable of suppressing performance deterioration due to processing or changes over time. <P>SOLUTION: An interference filter 5 includes a fixed mirror 56 and a movable mirror 57 which are opposed to each other through a gap G. The fixed mirror 56 and the movable mirror 57 contain an alloy film. The alloy film is an Ag-Sm-Cu alloy film containing silver (Ag), samarium (Sm) and copper (Cu) or an Ag-Bi-Nd alloy film containing silver (Ag), bismuth (Bi) and neodymium (Nd). <P>COPYRIGHT: (C)2012,JPO&INPIT |