发明名称 INTERFERENCE FILTER, OPTICAL MODULE AND ANALYZER
摘要 <P>PROBLEM TO BE SOLVED: To provide an interference filter capable of suppressing performance deterioration due to processing or changes over time. <P>SOLUTION: An interference filter 5 includes a fixed mirror 56 and a movable mirror 57 which are opposed to each other through a gap G. The fixed mirror 56 and the movable mirror 57 contain an alloy film. The alloy film is an Ag-Sm-Cu alloy film containing silver (Ag), samarium (Sm) and copper (Cu) or an Ag-Bi-Nd alloy film containing silver (Ag), bismuth (Bi) and neodymium (Nd). <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012027224(A) 申请公布日期 2012.02.09
申请号 JP20100165587 申请日期 2010.07.23
申请人 SEIKO EPSON CORP 发明人 SHINTO SUSUMU;KITAHARA KOJI
分类号 G02B5/28 主分类号 G02B5/28
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