EXPOSURE DEVICE FOR EDGE OF SUBSTRATE

摘要

An exposure apparatus for edge of a substrate is provided to expose both edge parts of the substrate easily by forming two linear light source regions with one lamp. A chamber(100) includes a reflective plate(120) for reflecting light of a lamp(110). A cooling chamber maintains constant temperature by suppressing a temperature increase due to the lamp and the reflective plate. A pair of first reflective mirrors(310a,310b) are installed on the left side of the cooling chamber in order to reflect the light of the reflective plate to both sides thereof. A pair of second reflective mirrors(320a,320b) are formed to reflect the light of the first reflective mirrors to the lower side. A pair of lenses(330a,330b) are formed to condense the light of the second reflective mirrors. A light source control unit(350) is installed on the lower side of the lenses in order to control the condensed light region and to irradiate the light to edge of a substrate. The lamp is a linear lamp having a shape of bar installed in a longitudinal direction.