MESOPOROUS SILICA FILM, STRUCTURE HAVING MESOPOROUS SILICA FILM, ANTIREFLECTION FILM, OPTICAL MEMBER, AND METHODS FOR MANUFACTURING THESE

摘要

PROBLEM TO BE SOLVED: To hold a low refractive index of a mesoporous silica film, and simultaneously suppress the variation in the refractive index due to moisture absorption.

SOLUTION: A surface layer in the region of a depth of <10 nm at least from one surface of a mesoporous silica film has a structure represented by SiO(2-n/2)Xn(wherein X denotes at least one selected from alkyl, fluoroalkyl and fluorine; n denotes an integer of 1 to 3; and in the case of X being alkyl or fluoroalkyl, X may partially contain an unsaturated bond). The element component ratio of the total of silicon, carbon and fluorine in the surface layer is ≥0.1, and the element component ratio of the total of carbon and fluorine to silicon in an inner layer being a region of a depth of ≥10 nm from the surface is smaller than the element component ratio in the surface layer.

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