| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor apparatus which is hardly affected by disturbance light and can be reduced in size. <P>SOLUTION: A sensor apparatus includes: a half mirror 402 for reflecting and transmitting through a detection laser beam LB1 emitted from a detection laser 401; an MEMS mirror (optical mirror) 403 for reflecting the detection laser beam LB1 reflected by the half mirror 402 to a side of a detection target space 405; a photodetection section 404 positioned at an opposite side of the MEMS mirror 403 with the half mirror 402 therebetween for detecting the detection laser beam LB1 reflected by an object 406 in the detection target space 405, then reflected by the MEMS mirror 403 and transmitted through the half mirror 402; and a determination section for determining the presence/absence of the object 406 in the detection target space 405 on the basis of output of the photodetection section 404. An optical axis OA1 between the detection laser 401 and the MEMS mirror 403 and an optical axis OA2 between the MEMS mirror 403 and the photodetection section 404 are matched between the MEMS mirror 403 and the half mirror 402. <P>COPYRIGHT: (C)2012,JPO&INPIT |
