| 摘要 |
What is described is a plant for preparation of monosilane (SiH4) by catalytic disproportionation of trichlorosilane (SiHCl3) comprising a column-shaped reaction column (101) with an inlet (102) for trichlorosilane, an outlet (103) for silicon tetrachloride (SiCl4) obtained, and a heating region (104), preferably at the lower end of the column, and a condenser (105), by means of which the monosilane prepared can be removed from the column (101), said column (101) comprising a segment (106; 107; 108) in which a catalytically active solid is present, and wherein the column segment (106; 107; 108) comprises a tube or tube bundle composed of two or more tubes (109; 110; 111) filled with the catalytically active solid. |
