发明名称 |
COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST |
摘要 |
In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits. |
申请公布号 |
US2012034562(A1) |
申请公布日期 |
2012.02.09 |
申请号 |
US20090551481 |
申请日期 |
2009.08.31 |
申请人 |
WAYTON GERALD B.;TREFONAS, III PETER;COLEY SUZANNE;KURIHARA TOMOKI |
发明人 |
WAYTON GERALD B.;TREFONAS, III PETER;COLEY SUZANNE;KURIHARA TOMOKI |
分类号 |
G03F7/11;G03F7/20;B32B27/06;B32B27/08;B32B27/36;C08G63/40;C09D167/00;G03C1/76;G03C1/825;G03C1/835;G03F7/004;G03F7/039;G03F7/09;H01L21/027 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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