| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a metal-carbon composite material capable of considerably improving various characteristics of a DLC film by controlling the inclusion of moisture etc. in a sputtering device when used as a sputtering target. <P>SOLUTION: The metal-carbon composite material is manufactured through a step of kneading and grinding carbon, a binder, and a metal or a metal compound, shaping the ground product to form a molding, and additionally heat-treating the molding at 1,300°C or more. <P>COPYRIGHT: (C)2012,JPO&INPIT |
