摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tape-shaped superconductor which has superconductive filament separated by oxide. <P>SOLUTION: The tape-shaped superconductor which has superconductive filament separated by oxide is manufactured by carrying out the following steps in order: a step of depositing one or two or more intermediate layers on a substrate, a step of forming a plurality of linear photoresist layers formed in parallel on the intermediate layer by a resist pattern, a step of forming an oxide layer by evaporation or sputtering on the intermediate layer and photoresist layer, a step of removing the photoresist layer and the oxide layer formed thereon and then forming a plurality of thin-line oxide layers formed in parallel on the intermediate layers, a step of forming an oxide superconductive layer between the oxide layers on the intermediate layer, a step of forming a stabilization layer on the oxide layer and the oxide superconductive layer on top of the intermediate layer, and a step of removing the stabilization layer formed on the oxide layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |