ULTRAVIOLET REGION TRANSMISSION TYPE TRANSPARENT CONDUCTIVE FILM AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film that has a transmittance of 50% or higher at an ultraviolet wavelength of 310 nm and has superior electric conductivity so as to solve the problem in which the conventional transparent conductive film has a reduced transmittance in an ultraviolet region.

SOLUTION: A thin film made of metal oxide containing SnO2as a main component contains at least one or more elements of Zr and Hf by 1-15 atom% in the metal to have a transmittance of 50% or higher at an ultraviolet wavelength of 310 nm. After the thin film made of the metal oxide having SnO2containing Zr or Hf as the main component is formed, a heat treatment is carried out at 700-1,000°C to obtain an ultraviolet region transmission type transparent conductive film with improved electric conductivity.

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