| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric pump having high discharge pressure without performing special processing on a pump casing. <P>SOLUTION: A diaphragm with a piezoelectric body adhered is used as a vibrating plate, and the outer periphery of the vibrating plate is fixed to the pump casing. The surface of the pump casing facing the vibrating plate is formed in a flat surface, and the vibrating plate is formed by adhering and fixing the piezoelectric body to the main surface of the diaphragm facing opposite to the pump casing with a thermosetting adhesive. The diaphragm is larger in the coefficient of linear expansion than the piezoelectric body; therefore, when voltage is not applied to the piezoelectric body, the diaphragm has a shape curved convexly in the opposite direction to the pump casing side, and by the curve of the diaphragm, a pump chamber is formed between the same and the pump casing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
