| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve the support stabilization of a piezoelectric element while at least a portion overlaps a tip region and a base end region in a z direction perpendicular to a disk surface without damaging the expansion and contraction operability of the piezoelectric element. <P>SOLUTION: A support part is provided with a pair of central extension pieces that extend outwardly in a width direction from a central beam connecting the base end region and the tip region, and the central extension pieces have a central overlapping region folded from the central beam such that a lower surface is located in a second flat surface separated more from the disk surface than from a first flat surface where lower surfaces of the base end region, the tip region and the central beam are located. The central overlapping region extends outwardly in a width direction across an inward edge in a width direction of the piezoelectric element and also ends more inwardly in a width direction than an outward edge in a width direction of the piezoelectric element in a planar view, and in the piezoelectric element, an upper surface side electrode layer, an end surface of the tip side and an end surface of the base end side are adhered to the central overlapping region, a base end wall surface of the tip region and a tip wall surface of the base end region, respectively by an adhesive while the outward edge in a width direction is free. <P>COPYRIGHT: (C)2012,JPO&INPIT |
