| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for cleaning silicon sludge under decompression which can prevents choke of a filter during filtration under decompression. <P>SOLUTION: The condition of filtration is set so that the mean particle diameter of solid contents containing silicon powder S falls within a range between 1 and 10 μm, the concentration of solid contents in a cleaning liquid of a rinse liquid falls within a range between 1 to 10 wt.%, and the mesh size of a mesh filter falls within a range between 5 and 10 times larger than the size of the solid contents. With this condition, negative pressure generated just above each mesh 14a gathers the solid contents to form an aggregate dome 15 of the solid contents right after the initiation of filtration under decompression. Porosity of the dome 15 prevents choke of the mesh filter during filtration under decompression. <P>COPYRIGHT: (C)2012,JPO&INPIT |
