发明名称 |
PROCESS CONTROL USING PROCESS DATA AND YIELD DATA |
摘要 |
A method for monitoring a manufacturing tool features acquiring metrology data (“Step a”). Data is acquired for process variables for a first process step performed by the manufacturing tool (“Step b”). A mathematical model of the first process step based on the metrology data and the acquired data is created (“Step c”). Steps b and c are repeated for at least a second process step (“Step d”). An nth mathematical model is created based on the metrology data and the data for the process variables for each of the n process steps (“Step e”). A top level mathematical model is created based on the metrology data and the models created by steps c, d and e (“Step f”). A multivariate metric is calculated based on the top level model of step f and data from subsequent runs of the manufacturing tool. Service is performed if the metric satisfies a condition. |
申请公布号 |
US2012035755(A1) |
申请公布日期 |
2012.02.09 |
申请号 |
US201113189280 |
申请日期 |
2011.07.22 |
申请人 |
BYRNE TAMARA;ERIKSSON LENNART;WOLD SVANTE BJARNE;MKS INSTRUMENTS, INC. |
发明人 |
BYRNE TAMARA;ERIKSSON LENNART;WOLD SVANTE BJARNE |
分类号 |
G05B13/04 |
主分类号 |
G05B13/04 |
代理机构 |
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