发明名称 PLASMA TREATMENT DEVICE
摘要 <p>The problem addressed by the present invention is the provision of a plasma treatment device with which it is possible to easily control the electron energy distribution of plasma in accordance with the type of gas molecules to be dissociated and the dissociation energy thereof. A plasma treatment device (10) according to the present invention comprises: a plasma treatment chamber (11); a plasma production chamber (12) that communicates with the plasma treatment chamber (11); a high-frequency antenna (16) for producing plasma; a plasma control plate (17) for controlling the electron energy of the plasma; and an operation rod (171) and a movement mechanism (172) for adjusting the position of the plasma control plate (17). By means of this plasma treatment device (10), it is possible to control the electron energy distribution of the plasma produced inside the plasma production chamber (12) simply by using the movement mechanism (172) to move the operation rod (171) longitudinally in order to adjust the distance between the high-frequency antenna (16) and the plasma control plate (17). It is therefore possible to easily treat plasma in accordance with the type of gas molecules to be dissociated and the dissociation energy thereof.</p>
申请公布号 WO2012018024(A1) 申请公布日期 2012.02.09
申请号 WO2011JP67698 申请日期 2011.08.02
申请人 OSAKA UNIVERSITY;EMD CORPORATION;SETSUHARA, YUICHI;EBE, AKINORI 发明人 SETSUHARA, YUICHI;EBE, AKINORI
分类号 H01L21/205;C23C16/509;H01L21/3065;H05H1/46 主分类号 H01L21/205
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