| 摘要 |
A probing method, a probe apparatus, and a storage medium are provided to determine contact between a probe needle and an electrode pad at high precision by forming a needle mark largely. A probe apparatus includes a driving mechanism(30) and a control unit(5). The driving mechanism moves a mounting block(3) in a horizontal direction and a vertical direction. The control unit outputs a control signal to contact an electrode pad of a subject on the mounting block to a probe needle(2) by lifting the mounting block and to stick a tip of the probe needle into the electrode pad by lifting the mounting block in a vertical direction and moving the mounting block in a horizontal direction, thereby cutting an oxide film of the surface of the electrode pad and electrically connecting the electrode pad and the probe needle.
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