| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten time required for analysis while diverting a conventional apparatus. <P>SOLUTION: Liquid supply is started by targeting stored target pressure, liquid is supplied by making flow rate before reaching the target pressure more than flow rate after reaching the target pressure (S101), and the liquid is supplied by making the flow rate after reaching the target pressure less than the flow rate before reaching the target pressure (S103). Since the flow rate at the start of the liquid supply becomes comparatively more, pressure promptly rises. In addition, the pressure does not excessively become high by reducing the flow rate after reaching the target pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
