发明名称 PARTIALLY PLATING METHOD, METALLIC LID MEMBER AND ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a partially plating method suitable for manufacturing a metallic lid member for air tight sealing of an electronic component. <P>SOLUTION: The partially plating method comprises the steps of: forming first resists 2a and 2b on principal faces of a metal substrate 1, provided that the first resist is formed on the whole principal face on one side of the substrate, and on the other side thereof, the first resist is formed on the principal face with openings 2c provided therein; supplying an etchant to the openings 2c in the first resist to form concave parts 3 in the principal face on the other side of the metal substrate 1; forming second resists 4 on inner walls of the concave parts 3; removing the first resists 2a and 2b; attaching a plating mask sheet 5 to the principal face on the one side of the metal substrate 1; and forming a plating film 6 on a part of the principal face on the other side of the metal substrate 1 except the parts where the concave parts 3 are formed, in turn. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012028454(A) 申请公布日期 2012.02.09
申请号 JP20100164069 申请日期 2010.07.21
申请人 MURATA MFG CO LTD 发明人 MEGUMI DAISUKE;OTANI SHINJI;KIMURA YUJI
分类号 H01L23/02;C23F1/00;C25D5/02;C25D7/00 主分类号 H01L23/02
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