| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared light heating furnace which, quickly discharges a vaporized component vaporized from a workpiece to the outside of the furnace without using excessive exhausting power when the sheet-like workpiece with a coated film formed on the surface of a substrate is dried while the workpiece is moved in a furnace body of the infrared light heating furnace. <P>SOLUTION: A plurality of exhausting parts and air feeding parts adjacent to the exhausting parts are alternately arranged in the longitudinal direction of the furnace on a ceiling where each exhausting part has a semi-cylindrical opening space that is opened toward the surface of the workpiece moved in the furnace and an exhaust port formed in a slit shape that confronts the opening surface of the opening space, and an air feeding port of the air feeding part is formed in a slit-shaped gap formed between the plurality of exhausting parts which are arranged. <P>COPYRIGHT: (C)2012,JPO&INPIT |
