| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve flow rate measuring equipment for more reducing any influence received from dusts. <P>SOLUTION: Flow rate measuring equipment 1 is provided with: a main channel 5 through which fluid flows; and a sub-channel part 20 in which the fluid is diverted from the main channel 5, and supplied to a flow rate detection element 12, and returned to the main channel 5, and the sub-channel part 20 is provided with: a diversion path 23 in which the fluid is diverted from the main channel 5, and not supplied to the flow rate detection element 12 but returned to the main channel 5; and a detection path 27 in which the fluid is diverted from the diversion part 23, and supplied to the flow rate detection element 12, and the division part 23 is provided with: a smooth flow part 45 through which the fluid smoothly flows between the both ends connected to the main channel 5; and a first chamber part 41 and a second chamber part 42 parted by a partition 43 installed adjacently to the smooth flow part 45 so as to hinder the flow of the fluid, and the both ends of the detection path 27 are respectively connected to the first chamber part 41 and the second chamber part 42. <P>COPYRIGHT: (C)2012,JPO&INPIT |
