| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device that can reduce speed variation during of movement of a sample mount stage at a low speed so that an observation image can be moved at a fixed speed when observation is executed at high magnification by a scan electron microscope. <P>SOLUTION: Position information detected by position detecting means is passed through a first low pass filter to achieve position information, and an speed instruction value input from stage operation input means is integrated and then passed through a second low pass filter having the same frequency characteristic as the first low pass filter to achieve an instruction value. Compensating means calculates a control amount on the basis of the deviation between the position information and the instruction value, and waveform output means generates a driving signal to be output to driving means on the basis of the addition value of the control amount and the speed instruction value. <P>COPYRIGHT: (C)2012,JPO&INPIT |
