| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a component for a film-forming apparatus, from which an adhering film formed thereon can be easily removed, and to provide a method for removing an adhering film, by which an adhering film formed on a component for a film-forming apparatus can be efficiently removed. <P>SOLUTION: The component for a film-forming apparatus includes a base and a precoat layer formed on the base. The precoat layer is formed from an aqueous inorganic coating agent containing an inorganic salt. The method for removing an adhering film includes forming an adhering film, treating a precoat layer with water and/or water vapor, and removing the adhering film, in this order. <P>COPYRIGHT: (C)2012,JPO&INPIT |
