发明名称 |
METHOD AND APPARATUS FOR MEMS OSCILLATOR |
摘要 |
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals. |
申请公布号 |
US2012034724(A1) |
申请公布日期 |
2012.02.09 |
申请号 |
US201113275617 |
申请日期 |
2011.10.18 |
申请人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK;MIRADIA INC. |
发明人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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