发明名称 |
PREPARING METHOD OF GRAPHENE, GRAPHENE SHHEET AND DEVICE USING THE SAME |
摘要 |
<p>PURPOSE: A method for manufacturing graphene, a graphene sheet, an element using the same are provided to simplify manufacturing processes by forming graphene on a substrate without a catalyst and omitting a process for eliminating a catalyst layer. CONSTITUTION: A method for manufacturing graphene forms graphene(20) on a substrate(12) by supplying heat and gas containing carbon source on the substrate to be reacted. The reaction is implemented at a temperature lower than or equal to 1000 degrees Celsius. The graphene is formed based on inductively coupled plasma-chemical vapor deposition, low pressure chemical vapor deposition, or atmospheric pressure chemical vapor deposition. The graphene is further cooled and patterned. The substrate is transparent and is patterned.</p> |
申请公布号 |
KR20120012271(A) |
申请公布日期 |
2012.02.09 |
申请号 |
KR20100074323 |
申请日期 |
2010.07.30 |
申请人 |
SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION |
发明人 |
HONG, BYUNG HEE;AHN, JONG HYUN;BAE, SU KANG;JUNG, MYUNG HEE;KIM, HYE RI;KIM, SANG JIN |
分类号 |
C01B31/02;C23C16/26;C23C16/513;H01L31/04 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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