| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable capacity device capable of suppressing charge transfer. <P>SOLUTION: In a variable capacity device 1, a movable plate 3 of beam structure is supported with a support plate 2. Electrodes each facing the movable plate 3 and the support plate 2 are provided, and one of the electrodes is covered with a main dielectric layer 8A. A sub-dielectric layer 8B is provided to prevent the main dielectric layer 8A from being exposed to a gap space, and a difference between electron affinity and work function of the sub-dielectric layer 8B and the electrode on the movable plate 3 is made larger than that in a constitution that the main dielectric layer 8A is exposed to the gap space. <P>COPYRIGHT: (C)2012,JPO&INPIT |
