发明名称 FAR INFRARED IMAGING APPARATUS AND IMAGING METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a far infrared imaging apparatus for irradiating a sample with far infrared light to detect an image of the sample, which is capable of quickly imaging the sample without using a high-output light source and without causing damage or a nonlinear phenomenon to the sample being an object to be imaged, and to provide an imaging method using the same. <P>SOLUTION: A sample is illuminated with far infrared light so that the far infrared light is in horizontally-expanded shape on the sample or a plurality of spots of the far infrared light are arrayed on the sample, and the sample is moved in a direction orthogonal to a horizontally-expanded direction of the far infrared light to detect an image. Pulsed pump light from femtosecond pulsed light source is irradiated to a far infrared light emitting element, and thereby the far infrared light is emitted. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012026943(A) 申请公布日期 2012.02.09
申请号 JP20100167681 申请日期 2010.07.27
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIMURA HIROSHI;NAKAI NAOYA
分类号 G01N21/35;G01N21/3563;G01N21/3586 主分类号 G01N21/35
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