Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same

摘要

PURPOSE: A thin film deposition apparatus and a method of manufacturing OLED display using the same are provided to increase the tensile force of a pattering slit sheet and enhance deposition efficiency. CONSTITUTION: A thin film deposition apparatus(100) comprises a deposition source(110), a nozzle unit(120), a patterning slit sheet(150), and a support unit. The deposition source emits deposition materials(115). A plurality of nozzles(121) of the nozzle unit are formed in a first direction. The patterning slit sheet is arranged to face the nozzle unit. The pattering slits(151) of the patterning slit sheet are formed in a second direction perpendicular to the first direction. For the patterning slit sheet not to sag to the deposition source, the support unit supports the patterning slit sheet.