发明名称 Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors
摘要 Sterically hindered imidazole ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes. A compound comprising one or more polysubstituted imidazolate anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-imidazolate anion. Synthesis of the novel compounds and their use to form BST films is also contemplated
申请公布号 US2012035351(A1) 申请公布日期 2012.02.09
申请号 US201113016127 申请日期 2011.01.28
申请人 NORMAN JOHN ANTHONY THOMAS;PEREZ MELANIE K.;KIM MOO-SUNG;AIR PRODUCTS AND CHEMICALS, INC. 发明人 NORMAN JOHN ANTHONY THOMAS;PEREZ MELANIE K.;KIM MOO-SUNG
分类号 C07F3/00;C07D233/58;C07D401/06;C07D403/06;C07D405/06;C07D471/18;C07D487/06;C30B25/02;H01L21/3205 主分类号 C07F3/00
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