OPTICAL SYSTEM FOR LASER OPTICAL RECTIFICATION AND WAVE FRONT CONTROL

摘要

Provided is an optical system (1) for laser optical rectification and wave front control comprising: an intensity conversion lens (24) that converts the intensity distribution of incident laser light and rectifies same to a desired intensity distribution; an optical modulation element (34) that modulates laser light emitted by the intensity conversion lens (24) and performs wave front control; a condensing optical system (36) that condenses laser light output from the optical modulation element (34); and an image-forming optical system (30) arranged between the optical modulation element (34) and the condensing optical system (36), with an incident light-side image-forming surface between a surface (24x) whereon the intensity of the laser light emitted by the intensity conversion lens (24) is distributed at a desired intensity distribution and a modulation surface (34a) in the optical modulation element (34), and with an emission light-side image-forming surface in a pupil surface (36a) in the condensing optical system (36).