| 发明名称 |
SURFACE TREATMENT DEVICE AND SURFACE TREATMENT METHOD |
| 摘要 |
<p>This surface treatment method comprises a step for accommodating a container in which an object to be treated is accommodated, and a treatment step for treating a surface of the object while the container is caused to perform a reciprocating motion and/or a swinging motion, and the object is caused to roll in the container.</p> |
| 申请公布号 |
WO2012018075(A1) |
申请公布日期 |
2012.02.09 |
| 申请号 |
WO2011JP67854 |
申请日期 |
2011.08.04 |
| 申请人 |
SHIMADZU CORPORATION;HIGASHI, MASAHISA;NAKATANI, ATSUO;NAKAO, EISAKU |
发明人 |
HIGASHI, MASAHISA;NAKATANI, ATSUO;NAKAO, EISAKU |
| 分类号 |
C23C16/458;C23C14/50;H01L21/31;H01L21/318;H01L31/04 |
主分类号 |
C23C16/458 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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