METHOD FOR MANUFACTURING SOLAR CELL

摘要

[Problem] To provide a method by which a solar cell having improved power generation efficiency can be manufactured. [Solution] A part of a first main surface (10b) of a semiconductor substrate (10) is exposed by removing a portion of a first semiconductor layer (22) not covered by an insulating layer (23) by means of etching that uses an etching agent. The first main surface (10b) of the semiconductor substrate (10) is cleaned using a cleaning liquid that contains hydrofluoric acid. The insulating layer (23) is formed such that the etching rate of the etching agent with respect to the first semiconductor layer (22) is higher than the etching rate thereof with respect to a first surface layer (23A) of the insulating layer (23), said first surface layer (23A) being on the reverse side of the first semiconductor layer (22) side, and the etching rate of the cleaning liquid with respect to a second surface layer (23B) of the insulating layer (23), said second surface layer (23B) being on the first semiconductor layer (22) side, is lower than the etching rate thereof with respect to the first surface layer (23A) of the insulating layer (23).