发明名称 |
SUBSTRATE FOR FLEXIBLE DISPLAY AND METHOD OF MANUFACTURING THE SUBSTRATE |
摘要 |
A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes: a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a multi-layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about−200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.
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申请公布号 |
US2012034451(A1) |
申请公布日期 |
2012.02.09 |
申请号 |
US201113087300 |
申请日期 |
2011.04.14 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
SEO SANG-JOON;MIN HOON-KEE;JIN DONG-UN;AN SUNG-GUK |
分类号 |
B32B5/00;B05D1/36;B32B9/04;C23C16/34;C23C16/40 |
主分类号 |
B32B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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