发明名称 |
EDGE DEVICES LAYOUT FOR IMPROVED PERFORMANCE |
摘要 |
A word line driver includes an active area having a length that extends in a first direction over a semiconductor substrate. A plurality of fingers formed over an upper surface of the active area. Each of the plurality of fingers has a length that extends in a second direction and forms a MOS transistor with a portion of the active area. A first dummy structure is disposed between an outer one of the plurality of fingers and an edge of the semiconductor substrate. The first dummy structure includes a portion that is at least partially disposed over a portion of the active area. |
申请公布号 |
US2012032293(A1) |
申请公布日期 |
2012.02.09 |
申请号 |
US20100851702 |
申请日期 |
2010.08.06 |
申请人 |
CHEN YEN-HUEI;CHEN JUNG-HSUAN;CHOU SHAO-YU;LIAO HUNG-JEN;TIEN LI-CHUN;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN YEN-HUEI;CHEN JUNG-HSUAN;CHOU SHAO-YU;LIAO HUNG-JEN;TIEN LI-CHUN |
分类号 |
H01L27/08;H01L21/822 |
主分类号 |
H01L27/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|