| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for floating conveyance capable of conveying a strip-shaped object in a stable manner. <P>SOLUTION: The floating conveyance method is provided for conveying the strip-shaped object 30 by alternately repeating the following steps: a first gas-jetting step for jetting gas from a first laterally movable nozzle (8) to the lower surface of the strip-shaped object 30 so that the strip-shaped object 30 is moved in a first direction perpendicular to the conveyance direction of the strip-shaped object 30; and a second gas-jetting step for jetting gas from a second laterally movable nozzle (9) to the lower surface of the strip-shaped object 30 so that the strip-shaped object 30 is moved in a second direction opposite to the first direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
