| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thermoelectric conversion module composed of multiple thermoelectric transducers by forming multiple thermoelectric conversion material chips collectively on a substrate by electrolytic deposition. <P>SOLUTION: Electrodes are arranged on an insulated substrate 10 and an insulation mask 14 made of resin which is soluble in an organic solvent are disposed between the electrodes. A mold plate 18 having conductive film all over the surface on one side thereof and through holes 20 at positions where chips are going to be formed is put in position, and the electrodes are electrolytically deposited as cathode electrodes in an electrolyte solution via the conductive film, thereby filling the through holes with a thermoelectric conversion material 32 to form chips, with the mold plate having the conducive film and the insulation mask removed. These steps are carried out in order for P-type and N-type thermoelectric conversion materials to produce a P-type half body which has electrodes and P-type chips arranged on an insulated substrate and an N-type half body which has electrodes and N-type chips arranged on another insulated substrate. The P-type half body and the N-type half body are combined to produce a thermoelectric conversion module composed of a combination of multiple thermoelectric transducers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
