Method for manufacturing functional coating of surface acoustic wave sensor for e.g. gas analysis, involves applying and distributing polymer preparation on surface of sensor by coating process

摘要

The method involves providing a polymer preparation with which polyurethane raw materials such as polyol and isocyanate are incorporated. A sorption polymer i.e. polybutyl methacrylate, is dissolved in organic solvent. The polymer preparation is applied and distributed on a surface of a surface acoustic wave (SAW) sensor by a coating process i.e. rotation coating e.g. spin coating or electrospray. A supporting structure is made of polyurethane, and the sorption polymer is included in the supporting structure. The coating comprises thickness in a range of 50 to 500 nanometers. An independent claim is also included for a SAW sensor comprising a sensor layer.