| 摘要 |
PURPOSE: A multichannel plasma jet generator is provided to make a large area by interlinking multiple unit plasma jet generators into the shape of a channel. CONSTITUTION: A multichannel plasma jet generator(100) comprises multiple unit plasma jet generators(10) and a power supply unit(60). The multiple unit plasma jet generators are installed at regular intervals for the formation of multichannel. The power supply unit applies AC voltage of the respective low frequency on multiple unit plasma jet generators. The multiple unit plasma jet generators irradiates discharged gas on the surface of the plasma jet using AC voltage of the low frequency applied from the power supply unit. The power supply unit comprises an AC voltage supply unit(65) including an SMPS(Switching Mode Power Supply)(61) and a DC-AC inverter(63). |
