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经营范围
发明名称
Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus
摘要
申请公布号
EP1975983(B1)
申请公布日期
2012.02.08
申请号
EP20080007239
申请日期
2004.07.14
申请人
NIKON CORPORATION
发明人
MURAKAI, KATSUHIKO
分类号
G21K1/06;H01L21/027;G03F7/20;G21K5/00;G21K5/02;H05G2/00
主分类号
G21K1/06
代理机构
代理人
主权项
地址
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