发明名称 In-Ga-Zn-TYPE OXIDE, OXIDE SINTERED BODY, AND SPUTTERING TARGET
摘要 An oxide including indium (In), gallium (Ga) and zinc (Zn), wherein diffraction peaks are observed at positions corresponding to incident angles (2θ) of 7.0° to 8.4°, 30.6° to 32.0°, 33.8° to 35.8°, 53.5° to 56.5° and 56.5° to 59.5° in an X-ray diffraction measurement (CuKαrays), and one of diffraction peaks observed at positions corresponding to incident angles (2θ) of 30.6° to 32.0° and 33.8° to 35.8° is a main peak and the other is a sub peak.
申请公布号 KR101107844(B1) 申请公布日期 2012.02.08
申请号 KR20117015327 申请日期 2010.11.17
申请人 IDEMITSU KOSAN CO 发明人 YANO KOKI;ITOSE MASAYUKI;KAWASHIMA HIROKAZU
分类号 C04B35/453;C04B35/64;H01L21/203 主分类号 C04B35/453
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