INFRARED ARRAY SENSOR

摘要

An infrared array sensor includes: a base substrate; cavities which have array structure and are formed on a surface side of the base substrate; and pixel parts supported by the base substrate to cover the cavities, respectively. Each of the pixel parts includes a membrane structure that includes segmented membrane structures divided by slits. Each of the segmented membrane structures includes a thermosensor. Each membrane structure of the pixel parts includes a coupling piece for connecting its own segmented membrane structures to each other.