Laser alignment device with a movable mirror, laser-target alignment sensor with movable mirrors and laser alignment method

摘要

A laser alignment device with at least one movable mirror, a laser-target alignment sensor with movable mirrors and a laser alignment method are disclosed. The laser alignment device with the movable mirror comprises an image acquisition means for collecting incident lasers, a moveable mirror for reflecting the lasers to the image acquisition means and is operable to move linearly with respect to the image acquisition means, and a lens for forming an image of a target in the image acquisition means. The present disclosure achieves linear motion of the movable mirror with high accuracy in a small range, which in turn achieves fast and accurate alignment of the laser. It solves the problem of laser spots overlapping, reduces alignment time and improves shooting accuracy.

主权项

1. A laser alignment device with a movable mirror, comprising:
an image acquisition means for collecting incident laser to form an image; a moveable mirror for reflecting the laser to the image acquisition means and blocking the laser to be directly irradiated to a target; and a lens which is located between the target and the image acquisition means and used to form an image of the target in the image acquisition means, wherein the movable mirror is operable to move linearly with respect to the image acquisition means in a direction perpendicular to the image acquisition means, and wherein the movable mirror is driven in the perpendicular direction by a servo driving system for a plurality of times to different positions so that (a) a relative distance between the movable mirror and the image acquisition means is dynamically adjusted for different sections of the target and (b) an image is formed at the image acquisition means at each position, and wherein a pitch angle of the laser reflected onto the image acquisition means is adjusted for at least one position of the movable mirror to form an image at another point thereon to optimize energy distribution of the laser.