| 摘要 |
The invention relates to a method of inspecting a sample (101), the method comprising:
repeatedly
€¢ Preparing a fresh surface (304,306) on the block face of a sample by removing the surface layer,
€¢ Inspecting the block face with a scanning probe microscope (100), resulting in information of the current surface layer,
Followed by
€¢ Combining the information of a multitude of inspections into a 3D reconstruction of the sample,
Characterized in that
The removal is performed in an evacuated environment by ion beam milling.
By performing the removal of the surface with ion beam milling, mechanical deformations are avoided, surface roughness is reduced, and the vertical resolution is enhanced, resulting in a better 3D reconstruction of the sample. |
