| 摘要 |
PURPOSE: An ion-supplying apparatus and a system for processing a processed object including the same are provided to uniformly eliminate static electricity by distributing and arranging carrier gas at a whole area of a slit. CONSTITUTION: An ion generator(55) generates an ion for removing static electricity. A carrier gas supply section supplies the carrier gas to the ion generator. An ion supply nozzle(58) sprays the ion and the carrier gas to an eliminated object which eliminates the static electricity through an outlet. The ion supply nozzle includes a plurality of inner fins which is installed at an inside flow path near the outlet. A slit is formed in the outlet.
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